Introduction for PECVD Plasma Enhanced Chemical Vapor Deposition - SlideServe
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Introduction for PECVD Plasma Enhanced Chemical Vapor Deposition - SlideServe
Introduction for PECVD Plasma Enhanced Chemical Vapor Deposition. Vacuum level ：. Under standard atmospheric pressure Pressure =1 atm =760 mmHg =760 torr = 1.013 x 10 5 Pa (?kg/cm 2 ) =1013 mbar =14.7 psi =7.6 x 10 5 micron.
Sep 20, 2014
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